Manufacturing and inspection equipment

Pressure Transmitter – Tem Tech Lab

Manufacturing and inspection equipment

Pressure Transmitter – Tem Tech Lab

Founded in 1982, Tem Tech Lab develops and produces various pressure transmitter that have been installed into major semiconductor equipment company.
Tem Tech Lab has various pressure transmitters used for special gas, Pure water or Chemical liquid in semiconductor manufacturing process, therefore meet the needs of customer.

Manufacturer information
tem-tech
Manufacturer Website
Pressure Transmitter – Tem Tech Lab

Pressure Transmitter for Special Gas Delivery System

High Corrosion Resistance Pressure Transmitter
HYZ series
・Accuracy of sensor’s linearity improved drastically to be compensated by the mounted Original ASIC
・High Corrosion Resistance Hastelloy Diaphragm
・For CC(Cylinder Cabinet) and GSGS(Bulk Specialty Gas System)
Brochure 1.4MB
Vacuum Gauge
SE1000 series
・General Purpose Vacuum GaugeBrochure 1.3MB

Pressure Transmitter for Semiconductor Equipment and Gas Panel

IGS Pressure Transmitter with rotatable display
HYPF-6700/-6801 series
・Pressure Transmitter with rotatable display and selectable display angle Brochure 1.6MB
IGS High Corrosion Resistance Pressure Transmitter
HYZF series
・C seal, W seal type available
・High Corrosion Resistance Hastelloy Diaphragm
Brochure 1.4MB

Intrinsically Safe Explosion-Proof Construction Pressure Transmitter

Intrinsically Safe Explosion-Proof Construction Pressure Transmitter
HYPS-B series
・Intrinsically Safe Explosion-Proof Construction Pressure Transmitter for Hazardous Location Zone 0/1/2
・Approval Number
TC19231:Technology Institution of Industrial Safety
11-AV4BO-0100 :KOSHA (Korea Occupational Safety and Health Agency)
GYJ13.1041X:NEPSI (National Supervision and Inspection Center for Explosion Protection and Safety of Instrumentation)
Brochure 1.4MB

Pressure Transmitter for CMP Slurry and Chemical liquid

Seal-Free PFA Pressure Sensor for CMP Slurry System
SE4000 series
・Completely Flow Through
・No dead volume Diaphragm reduce the problem of CMP Slurry, bubble and other contamination
・Negative Pressure Measurement with One body structure
Brochure 1.4MB
Seal-Free PFA Pressure Sensor for Wet Processes
SE3000 series
・PFA Pressure Sensor in a single piece design provides reliable pressure measurement in high purity and corrosive chemicals
・Negative Pressure Measurement with One body structure
Brochure 1.4MB

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+81-(0)3-6412-6032