LSE-8000 [LEED Corporation(Korea)]
Features
- Innovative multi helicon sauce (product made from Korean LEED Corporation) loading
- Particle and residual substance free high exhaust efficiency process chanber
- Shortening of the recovery time after long-term running and cleaning
- Difficulty etching material highness rate etching
- Option-equip normal temperature and a high temperature electrostatic zipper with a built-in heater.
General
Multi-helicon plasma sauce (patent acquisition)which South Korean LEED Corporation(formerly Nexso) developed is carried. Low pressure and high-density plasma are made in etching of a scarce ferroelectric material (PZT and SBT) and metal electrode material (Pt, Ir). By the combination of a wafer conveyance system, use of the process module same from research and development to a mass-production use is possible and we corresponds to extension and upgrade.
