LSC-7000 [LEED Corporation(Korea)]
Features
- Realization of a CVD system High-definition plasma by double cycle excitation
- Outstanding maintenance by reducyion of wastage component
- Achievement of large area quantity uniform film
- Outstanding heater temperature distribution
- Reduction of the particle by outstanding exhaust efficiency
- Equipment variations according to the price and the use
General
South Korean LEED Corporation(formerly Nexso) introduces a high rate PE-SiH4 CVD process (PE-SiO2 :> 10000A/min). By adopting the parallel monotonous plasma CVD system by the double cycle excitation system, precise and high film of stress control nature can be performed at high speed.
